Sputtering Device

The sputtering device developed and manufactured by Northglass includes rotatable/planar cathode, end blocks and magnet bar. And also we can offer customized design and fabrication for all new and existing coaters with above mentioned parts.

Northglass provides single rotatable cathode, double rotatable cathode, single planar cathode and double planar cathode. Each cathode component contains cathode base, lid, process gas distribution, water and electricity connection, vacuum measurement, control system, etc.

End Block

Northglass provides three series of end blocks including EB-CAC, EB-CB and EB-CS to meet the demands of customers in different fields.
All the end blocks could be maintained by trained staff themselves from the users and training program can be done in the user's workshop, saving time and cutting down cost greatly.

1. EB-CAC Series
Each pair of the end blocks is composed of driving end and water/electric end. The driving end is for target rotation and the other is for connection of water/electricity.
This series could be used in nearly all kinds of cathodes of symmetric coaters.

Series	Type	Current-frequency	RPM	Target tube diameter	Target tube length	Safe voltage
EB-CAC	Double end	≤320A, ≤40kHZ	≤30r/min	≤155mm	≤3900mm	< 1500V

2. EB-CB Series
Composed of a functional end and a support end in each pair. The functional end is for target rotation and connection of water/electricity, and the other one serves as a support.
This series could be used in asymmetric coaters.

Series	Type	Current-frequency	RPM	Target tube diameter	Target tube length	Safe voltage
EB-CB	Single end	≤320A, ≤40kHZ	≤30r/min	≤155mm	≤3900mm	< 1500V

3. EB-CS Series
Composed of a functional end and a support end in each pair. The functional end is for target rotation and connection of water/electricity, and the other one serves as a support.
This series could be used in asymmetric coaters.
The target-substrate distance could be adjustable easily due to the downward installation method.

Series	Type	Current-frequency	RPM	Target tube diameter	Target tube length	Safe voltage
EB-CS	Single end	≤225A, ≤40kHZ	≤30r/min	≤155mm	≤2500mm	< 1500V

MB Series Magnet Bar
Technical Features:
The extruded aluminum supporting tube makes the magnet and its yoke isolate from the cooling water to avoid the change of the magnetic field due to soaking in the water for a long time. It improves the rigidity of the magnet bar apparently, and reduces the fluctuation of the magnetic field due to the friction between the twisted magnet steel and target tube. Magnetic field uniformity could be controlled accurately by using new screw thread adjustment structure.
Cooling water is ejected directly from the high temperature location of the target tube, removing heat efficiently.
It's easy and convenient for installation and maintenance.

Type Data	MB3300	MB2540	MB1400
Length of magnet bar ( mm )	3850	3192	1920
Magnetic strength	>550GS
Homogeneity	≤±1.0%
Adjustable range	≤±25%