Carbon Graphite Products for Electronic and Semiconductor Industry

Carbon Graphite Products for Electronic and Semiconductor Industry

Our company provides a variety of carbon graphite products for electronic and semiconductor industry, including semiconductor graphite muold, fuel cell deflector, graphite matrix, graphite pad for cutting silicon rod, graphite lining for electron beam evaporation, graphite boat for glass and metal packaging, electronic sintering mould, graphite parts for ion implantation, heater, heat shield and crucible for single crystal furnace, electron tube anode, etc.

The raw materials we adopt feature high purity, fine particle, high density, good thermal conductivity property, high mechanical strength, low permeability, heat shock resistance, good thermal stability, corrosion resistance, and oxidation resistance. They are suitable to produce various semiconductor moulds and large-scale electron tube anodes.

Graphite Mould for Semiconductor

 
Graphite boat for induction heating and zone melting

 
Graphite susceptor for epitaxy of silicon wafer

The graphite is a good conductor of electricity and heat. It can be made into an excellent resistance heating element in the absence of oxygen. High strength can be maintained even when it is used under high temperature. The graphite matrix binds the reinforcement as a whole and transmits the load to the reinforcement, which enables the chemical vapor deposition to complete successfully.

The chemical vapor deposition (CVD) is actually a gaseous mass transfer process in the atomic field. The reacting matters react in the gaseous condition and the produced solid matter deposits on the surface of the heated solid substrate, thus obtaining the desired solid material.

Graphite Thermal Field for Pulling Monocrystalline Silicon

 
Graphite heating element for pulling fiber optics

Graphite Matrix for Vapor Deposition
The world established the goal of energy conversation and emission reduction based on the reduction of carbon emission at the Energy Conference in Copenhagen. Solar photovoltaic power generation is an important part of the low-carbon economy. The solar battery produced by the single crystal silicon can directly convert the solar energy into the electric energy. The high-purity monocrystalline silicon is an important semiconductor material and the graphite thermal field is one of the most important conditions in the crystallization of silicon material. The gradient distribution of the thermal field directly determines whether the single crystal can be drawn or not and the quality of the produced single crystal. The high purity isostatic graphite is often used to make the heater, electrodes, electrode nuts, heat shield, draft tube, three-segment crucible, and other parts of the thermal field system for the drawing of single crystal silicon. The quality of the graphite, the design and craft of the crucible, and other critical technologies directly affect the quality of the produced single crystal silicon. After many years' research, researchers of our company have mastered the key part of these technologies. We can design, modify and produce the thermal field products according to customers' requirements. Compared with other similar products, our products have an extra service life of three to five furnace times, reduce the energy consumption of the crystal drawing by 12% to 15%, and increase the crystallization rate of the crystal rod by 6% to 10%.  

Thermal field heater

Graphite Jig for Semiconductor

Graphite heat shield

The high purity graphite (like RINGSDORFF),carbon fiber composite materials (like SIGRABOND) and thermal insulation materials (like SIGRATHERM) are often used in the devices used to produce single crystal silicon, single crystal germanium and group III-V compound single crystal. These devices include crucible, heater, heat shield, draft tube, conductive connecting parts, etc.

The graphite electrode can be used for the deposition of polysilicon. The graphite used in this process should have excellent electrical conductivity, a certain degree of thermal conductivity, high mechanical strength, high purity, and high machining precision.

Graphite Heater for Monocrystalline

Graphite Thermal Field for Monocrystalline Furnace

Draft tube

External heat shield for polycrystalline furnace

Polycrystalline boat for casting

Three segment crucible

Internal cover and external cover for polycrystalline silicon hydrogenation furnace

Graphite Jig for Polycrystalline Silicon

Graphite heater

The graphite with fine particles and high density has excellent corrosion resistance even when it is exposed to ion beam bombardment, so it can be used to produce the components used in the ion implantation process.

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Related Names
Semiconductor Industry used Carbon Graphite Product | Graphite Product as Raw Material of Electronic Semiconductor Industry | Graphite Material for Semiconductor Industry | Electronic Semiconductor Graphite
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