Oxidation-free high temperature chamber can prevent products from oxidation under high temperature. It is suitable for application in many industries, such as semiconductors, liquid crystal, electronic products and precision appliance.
Model | SNO-216 | ESNO-216 | SNO-512 | SNO-512 | SNO-1000 | ESNO-1000 | |||||||
Effective Volume (L) | 216 | 512 | 1000 | ||||||||||
Temp. Range (℃) | Min | RT 30 | |||||||||||
Max | 250 | 350 | 250 | 350 | 250 | 350 | 250 | 350 | 250 | 350 | 250 | 350 | |
Temp. uniformity (℃) | ≤1.0 | ||||||||||||
Temp. fluctuation (℃) | ≤ ±0.5 | ||||||||||||
Temp. deviation (℃) | ±1.0 | ||||||||||||
Cooling rate (℃/min) | 250℃ series, no load, from 225 ℃ to 60 ℃, ≤100min | ||||||||||||
350℃ series, no load, from 350 ℃ to 60 ℃, ≤180min | |||||||||||||
Heating rate (℃/min) | no load, from RT 15 ℃ to 200 ℃, ≤60min | ||||||||||||
Residual oxygen concentration in the chamber | 20 ppm minimum (depending on the purity of inert gas used) | ||||||||||||
Consumption of high-purity inert gas (N2) when the residual oxygen concentration in the chamber≤100ppm | ≤60L/min (≤40min down to) | ≤120L/min (≤40min down to) | ≤240L/min (≤40min down to) | ||||||||||
≤14L/min (concentration maintaining) | ≤28L/min (concentration maintaining) | ≤56L/min (concentration maintaining) | |||||||||||
Consumption of high-purity inert gas (N2) when the residual oxygen concentration in the chamber≤50ppm | ≤60L/min (≤60min down to) | ≤120L/min (≤60min down to) | ≤240L/min (≤60min down to) | ||||||||||
≤20L/min (concentration maintaining) | ≤40L/min (concentration maintaining) | ≤80L/min (concentration maintaining) | |||||||||||
Internal Dimensions(mm) | W | 600 | 800 | 1000 | |||||||||
H | 600 | 800 | 1000 | ||||||||||
D | 600 | 800 | 1000 | ||||||||||
External dimensions(mm) | W | 860 | 960 | 1100 | 1200 | 1060 | 1160 | 1300 | 1400 | 1260 | 1360 | 1500 | 1600 |
H | 1430 | 1330 | 1510 | 1610 | 1530 | 1630 | 1710 | 1810 | 1730 | 1830 | 1910 | 2010 | |
D | 1500 | 1400 | 1600 | 1700 | 1600 | 1700 | 1800 | 1900 | 1800 | 1900 | 2000 | 2100 | |
Maximum power (not the sum of all power) (KW) | 4.5 | 6.0 | 4.5 | 6.0 | 7.5 | 9.0 | 7.5 | 9.0 | 11.0 | 13.0 | 11.0 | 13.0 | |
Leakage switch 4P (A) | 16 | 16 | 16 | 16 | 16 | 20 | 16 | 20 | 25 | 25 | 25 | 25 | |
Noise (dB) | Less than 65 dB (measured 500 mm from the display screen) |