Chemical Vapor Deposition Furnace

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The chemical vapor deposition furnace is the specialized industrial furnace for manufacturing high-quality TiC, SiC, SiO2 and Si3N4 applicable for substrates. This experimental electric furnace comes with high deposition temperature ranging 100 to 1800℃.

Our chemical vapor deposition furnace has been proved to be ideal for manufacture of dielectrics, semiconductors and metal films, such as SiO2, Si3N4, amorphous Si:H, heteromorphic Si, SiC, W, Ti-Si, GaAs and GaSb, etc. This high temperature electric furnace is the tool of choice for industries of machinery production, metallurgy, optics and semiconductor.

Structure
1. This chemical vapor deposition furnace mainly comprises vacuum stainless steel hearth, turbomolecular pumping system, power supply, reaction carrier, temperature control system and cooling water assistive device, as well as independent exhaust and reaction pressure adjusting system.

2. The entire structure is compacted. Optimal layout ensures easy operation and fast vacuum pumping.

3. Control system is available as manual control and IPC automatic control.

4. Vacuum pumping and coating can be done in one production cycle.

Technical data

Items	Unit	Model
Items	Unit	EF-4-18	EF-8-18	EF-12-18	EF-16-18	EF-20-18
Rated power	kW	21	30	45	60	75
Rated voltage	V	380	380	380	380	380
Max. temperature	℃	1800	1800	1800	1800	1800
Working temperature	℃	≤ 1700	≤ 1700	≤ 1700	≤ 1700	≤ 1700
Vacuum degree		6.67Pa	6.67Pa	6.67Pa	6.67Pa	6.67Pa
Substrate platform size	Inch	Ф4	Ф8	Ф12	Ф16	Ф20
Rotation speed of substrate platform		0-20RPM	0-20RPM	0-20RPM	0-20RPM	0-20RPM
Thermal insulation material		Graphite	Graphite	Graphite	Graphite	Graphite
Heating component		Graphite	Graphite	Graphite	Graphite	Graphite
Temperature rising rate	℃/min	≤ 25	≤ 25	≤ 25	≤ 25	≤ 25
Temperature accuracy	℃	±1	±1	±1	±1	±1
Standard configuration		1. Three-channel flow meter: nitrogen, hydrogen, methane, argon
Standard configuration		2. Gas (hydrogen and methane) circuit alarm system, over temperature alarm, water shortage alarm
Options		1. Exhaust gas handling equipment
		2. Gas cylinder and pressure reducing valve
		3. Cooling system

Application

Supporting Equipment Microwave Vacuum Sintering Furnace Amorphous Alloy Powder Equipment PSA Nitrogen Generator

Related Names
CVD Equipment | Vapor Deposition Furnace | Chemical Vapor Deposition

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